Kiribati ZHK3606 Ultra-pure Gas Dilution System (semiconductor industry)

The ZHK3606 ultra-pure gas dilution system (for the semiconductor industry) can prepare mixed gas for five types of calibration gases (customizable). The dilution ratiocanreachupto1:10,000,featuringtwo-stagedilutionandhighprecision,along withahumidificationfunction.Itissuitableforproducttestingbysensormanufactur-ers, semiconductor manufacturers, and scientific research institutions. Customiza-tion according to user requirements is available.

Category:

KiribatiLabsoratory VOCs Pre-treatment Series

Main Features

● BTEX (Benzene, Toluene, Ethylbenzene, Xylene), PAMS, sulfides, TO-15, HCHO, SO2, N2O, NO2, and others;
● Equipped with a humidification function to control the humidity of the diluted gas.
● High-precision mass flow controllers (MFC) allow for accurate gas concen-tration formulation.
● A liquid standard dilution module can be optionally configured.

 

Application

● Sensor manufacturers
● Semiconductor manufacturers 

● Research institutions