Product

ZHK3606 Ultra-pure Gas Dilution System (semiconductor industry)

The ZHK3606 ultra-pure gas dilution system (for the semiconductor industry) can prepare mixed gas for ﬁve types of calibration gases (customizable). The dilution ratiocanreachupto1:10,000,featuringtwo-stagedilutionandhighprecision,along withahumidiﬁcationfunction.Itissuitableforproducttestingbysensormanufactur-ers, semiconductor manufacturers, and scientiﬁc research institutions. Customiza-tion according to user requirements is available.

Commodity name： ZHK3606 Ultra-pure Gas Dilution System (semiconductor industry)

Category:

Labsoratory VOCs Pre-treatment Series

E-mail:

Frederick@dinglimachinery.com

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Product Description

Main Features

● BTEX (Benzene, Toluene, Ethylbenzene, Xylene), PAMS, sulﬁdes, TO-15, HCHO, SO₂, N₂O, NO₂, and others;
● Equipped with a humidiﬁcation function to control the humidity of the diluted gas.
● High-precision mass ﬂow controllers (MFC) allow for accurate gas concen-tration formulation.
● A liquid standard dilution module can be optionally conﬁgured.

Application

● Sensor manufacturers
● Semiconductor manufacturers

● Research institutions

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HuanKong Instrument(Zhejiang) Co., Ltd. is a high-tech enterprise integrating R&D, production and sales, specializing in the innovation and manufacture of environmental monitoring instruments, laboratory analytical instruments and VOC pre-treatment series instruments.

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